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> Sputtering Target / Spray forming


1.Characteristics
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Fine and unifo0rm grains |
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Uniform distribution of alloy elements |
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Suppression of splash |
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3.Alloy Element
Distribution
| ■TEM observation of spray forming target [Al-2at%Nd] |
![TEM observation of spray forming target [Al-2at%Nd]](images/t11.jpg) |
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| ■Comparison with casting (VIF) [Al-2at%Nd] |
![Comparison with casting (VIF) [Al-2at%Nd]](images/t12.jpg) |
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