Multi-layer wafer lifetime map


Lifetime measurement of multi-layer wafers such as epi/SOI is performed, by applying the differential method to the microwave detection system and optimizing wavelength of excitation light and microwave frequency.Suitable for crystallinity evaluation of not only Si wafers but also wide band gap semiconductors (SiC, GaN, etc.).

SOI Wafer

SOI layer

Substrate

Epi Wafer

Epi layer

Substrate

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