Various measurements/Indication mode


N point measurement

Measurement of arbitrary coordinate on the wafer at any (1 - 50) points is possible.

Mapping measurement

Mapping measurement of the whole wafer surface is possible in 0.5,1,1.5,2,3,4,5,10,15,20mm pitches.

Partial measurement (Option)

Arbitrary area designated by combining ,, etc. is measured in Min. pitch 0.5mm.

Partial display (Option)

Arbitrary area of the map data saved in the file which is designated by combining ,, etc. is indicated.

3D indication (Option)

Map data saved in the file is indicated in the 3 dimension form.

 

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