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Al-Nd Sputtering Target

Surface Morphology

Overview

AlNd Alloy which made by spray forming process has higher heat resistance and are used as interconnections and reflectors.

Features

  • High Hillock Resistance.
  • Low Electric Resistance
  • High Reflectivity

Spray Forming Technology

Comparison of Nd distribution in Al-Nd alloys

Overview

The spray forming technique is essentially a method manufacturing rapidly solidified, semi-finished products so called “preforms”. They are made up by depositing sprays of droplets that have been created by gas atomizing of a melted alloy’s stream.

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Features

  • Uniform structure and composition
  • Extremely fine grains
  • Low sprash rate

Advanced Alloy is the registered trademark of new alloys for sputtering targets that KOBELCO RESEARCH INSTITUTE produces.