Chamfering shape, notch shape, orientation flat shape and diameter of 200mm and 300mm wafers are measured in full-automation.  With the wafer transfer robot equipped,  "cassette to cassette" measurement  is possible.  By memorizing several recipes beforehand, judgment reference of measurement length can be switched according to the subject to be measured. 
In 1 sequence, 9 measurement points can be designated.  Orientation flat or V-notch are automatically detected, and alignment of measuring positions is automatically made.
With option software, OK/NG judgment according to templates or judgment reference are possible.

This is a manual type edge profiler measuring 200mm and 300mm wafers.  By setting wafers to the measurement stage, chamfering shape, notch shape, orientation flat shape and diameter are automatically measured.  By memorizing several recipes beforehand, judgment reference of measurement length can be switched according to the subject to be measured. 
In 1 sequence, 9 measurement points can be designated.  Orientation flat or V-notch are automatically detected, and alignment of measuring positions is automatically made.
With option software, OK/NG judgment and according to templates or judgment reference are possible.

This is the manual type edge profiler measuring 100mm, 125mm,150mm, 200mm and 300mm wafers. By setting wafers to the measurement stage, chamfering shape, notch shape are automatically measured. By memorizing several recipes beforehand, judgment reference of measurement length can be switched according to the subject to be measured.

This is the manual type edge profiler measuring 100mm, 125mm,150mm, 200mm and 300mm wafers. By setting wafers to the measurement stage, chamfering shape are automatically measured. By memorizing several recipes beforehand, judgment reference of measurement length can be switched according to the subject to be measured.

This is the manual type notch profiler measuring Notch shape of 200mm and 300mm wafers in non-contact method. By setting the wafer to the measurement stage, notch shape is automatically measured, and result is displayed on the CRT.