[KOBELCO/LEO]Photovoltaic Power Generation

Wafer Edge Profile Monitor LEP-2200FE

Display

Repeatability
		σ
Edge	Length	1μm(Type A,B) 2μm(Type C)
	Angle	0.1°
	Radius (R)	5.0μm
	Thickness	0.5μm
Notch	Length	2μm
	Angle	0.1°
	Radius (Vr)	5μm
Diameter		3µm
Notch chamfering width (Option)		1µm

TSV/BSI process TOP

Kobelco Research Institute, Inc. LEO Division
Sales(Tokyo)/9-12 Kita-Shinagawa, 5-Chome, Shinagawa-ku, TOKYO, 141-8688, JAPAN [TEL]81-3-5739-6820 [FAX]81-3-5739-6393
Sales(Kobe)/5-5 Takatsuka-dai, 1-Chome, Nishi-ku, Kobe, HYOGO, 651-2271, JAPAN [TEL]81-78-992-2985 [FAX]81-78-992-2990

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