�{�E�E���[�v���葕�u�@SBW-330
| �d�l Specification | SBW Series |
|---|---|
| ����Ώ� object | �V���R���P�����E�F�[�n�A�K���X�x���� silicon single crystalline wafer, glass support |
| ���a diameter | 100�`450mm |
| �v�� Measurement | Thickness, TTV�ABow/Warp |
| �Z���T sensor | �Ód�e�ʕ����A���w�� capacitive, optical sensor |
| �����͈� thickness range | 700�`1,000��m |
| ���x accuracy | �}0.5��m |
| ���� repeatability | ��=0.1��m |
| �\�� display resolution | 0.01��m |
| �v������ duration | 4lines�C2mm pitch�F ��48sec/wafer |
|
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