製品一覧

SYSTEM

Lifetime Measuring System

Carrier recombination lifetime is measured with system.

Thin Film evaluation system for FPD

for valuation of the crystallinity of LTPS without contact and distruction.

Flatness・profile Measurement System

Broadly used for optimization of wafer edge processing and inspection for shipping.

Makyo System

for control of wafer polishing process, delivery inspection and control of heat treatment products.

Edge/Notch Profile Measurement System

By our unique optical image processing technology, high precision edge/notch measurement is possible.

Edge Roll Off Measuring System

Automatic measurement is posible for thickness, chamfer, width of the wafer edge and also the wafer diameter , length of orientation flat and notch shape.

Sorting System・Transfer Machine

Any combination of measurement menu is available.

Bonding Evaluation・Edge Defect Inspection System

will detect defects such as fine scratches and cracks near the edge.

PAGETOP