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Laser Electron,Optics.
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Principle：Micro PCD Method

μ-PCD：Microwave PhotoConductivity Decay

The time-change of carriers injected into sample by laser will be detected by the reflected power of microwave.

Target Materials and Equipment Configuration

Combination of Excitation Laser and Microwave Detector to Measure Various Materials

Various Bulk Wafer

LifetimeMap for Various Bulk Wafer

Iron Concentration (Optional)

Iron Concentration Measurement by μ-PCD

Corona Charge（Optional）

Surface Passivation by RTP Oxide Film and Charge Depositin

System Lineup

The system is equipped with Japan Electronics and Information Technology Industries Association(JEIDA-53) compliant 904nm laser and 9.6GHz microwave antenna detector .
With users choice, 349nm laser and differential 26GHz microwave antenna detection unit can be equipped to a system as a option.