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  4. Lifetime Measuring System

Lifetime Measuring System

Principle：Micro PCD Method

μ-PCD：Microwave PhotoConductivity Decay

The time-change of carriers injected into sample by laser will be detected by the reflected power of microwave.

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Target Materials and Equipment Configuration

Combination of Excitation Laser and Microwave Detector to Measure Various Materials

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Various Bulk Wafer

LifetimeMap for Various Bulk Wafer

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Iron Concentration (Optional)

Iron Concentration Measurement by μ-PCD

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Corona Charge（Optional）

Surface Passivation by RTP Oxide Film and Charge Depositin

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System Lineup

The system is equipped with Japan Electronics and Information Technology Industries Association(JEIDA-53) compliant 904nm laser and 9.6GHz microwave antenna detector .
With users choice, 349nm laser and differential 26GHz microwave antenna detection unit can be equipped to a system as a option.

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