Measurement Service List（旧ページ）
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- Measurement Service List（旧ページ）
Measurement Service List
measurement services by contract using our unique measurement systems is possible.
Lifetime Measurement
Lifetime measurment for Semiconductor materials such as Si,SiC, GaN, LTPS, and IGZO
Litetime mapping example of bulk wafer
Lifetime measurement for semiconductor materials such asn Si, SiC, GaN, LTPS, and IGZO. By measuring the lifetime, the heavy metal mixture of a wafers, the integrity of the crystals can be measured and also the wafer pollution cause may be detected.
Standard Spec. pitch measurement of our Lifetime equipment is 0.5mm and with it high speed small mapping is possible.
Blue figure represents short lifetime.
contamination by chucking
contamination by oxidation boat
OSF (Oxidation-induced Stacking Fault) ring
Pin contact from
the manufacturing equipment
Slip Dslocation by
thermal treatment
Absorption traces of
vacuum tweezers
Flatness/Profile Measurement
Flatness: Si, SiC Sapphire substrate(Bow, Warp, TTV, GBIR, FSQR, and etc) flatness measurement.
Measurement Example
Makyo Observation
Makyo: Si Substrate(Mirror) surface observation
Si Wafer surface observation example
Surface Roughness, Projection, Dent, Grinding Masks , Edge Crack, and Thermal Slip appears clearly
面荒れ
Orange Peel
突起/凹み
Dimple/Protuberance
凹み
Dimple
研磨痕
Polish Mark
研磨痕
Polish Mark
エッジクラック
Edge Crack
スリップ転位
Thermal Slip
スリップ転位
Thermal Slip
研削痕
Grinding
Edge Profile Measurement
Edge Profile: Si, SiC, Sapphire Substrate edge(bevel) profile measurement.
Edge/Notch profile mearement example
shows the measurement example of edge/notch profile.
different profiles canbe supported using optional software.
Edge profile measurement example(LCD display)
Edge profile measurement example(LCD display)
Edge 9 points display screen
Edge Roll Off Measurement
Edge Roll Off (ROA: Roll Off Amount) can be measured without any contact/distruction front/back at the same tme.
Edge Roll Off mearement example
